Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Pyroelectric Infrared Sensors using (Pb,La)TiO3/LiTaO3/(Pb,La)TiO3 Multilayer Ferroelectric Thin Films

(Pb,La)TiO3/LiTaO3/(Pb,La)TiO3 다층 강유전 박막을 이용한 초전형 적외선 센서

  • Sung, Se-Kyoung (Department of Electronic Engineering, PuKyong National University) ;
  • Lee, Du-Hyun (Department of Electronic Engineering, PuKyong National University) ;
  • Choi, Hyek-Hwan (Department of Electronic Engineering, PuKyong National University) ;
  • Lee, Myoung-Kyo (Department of Electronic Engineering, PuKyong National University) ;
  • Kwon, Tae-Ha (Department of Electronic Engineering, PuKyong National University)
  • Published : 2002.07.31
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Abstract

For fabrication of the pyroelectric IR sensor $(Pb,La)TiO_3(PLT)$/$LiTaO_3$/(LTO)/PLT ferroelectric thin films was deposited by rf magnetron sputtering followed by rapid thermal annealing and the crystallinity as a function of annealing temperature and time was investigated. Permittivity and dielectric loss factor of ferroelectric thin films as a function of c-axis preffered orientation was measured. Also pyroelectric coefficient of ferroelectric thin films with largest c-axis preffered orientation was measured and obtain figure of merit of voltage response($F_V$) and detectivity($F_D$). In this case $F_V$, $F_D$ was $5.63{\times}10^{-10}\;C{\cdot}cm/J$, $1.98{\times}10^{-8}\;C{\cdot}cm/J$, respectively.

초전형 적외선 센서를 제작하기 위하여 rf 마그네트론 스퍼터링법으로 $(Pb,La)TiO_3(PLT)$/$LiTaO_3$(LTO)/PLT 강유전 박막을 증착한 후 급속 열처리하여 열처리 온도와 시간에 따른 결정성을 조사하였다. 강유전 박막의 c축 배향도에 따른 비유전율 및 유전손실을 측정하고 C축 배향도가 가장 큰 강유전 박막으로 제작된 센서에 대해 초전계수를 측정하여 센서의 전압응답에 대한 성능지수($F_V$)와 감도에 대한 성능지수($F_D$)를 구하였다. 얻어진 $F_V$, $F_D$는 각각 $6.15{\times}10^{-10}\;C{\cdot}cm/J$, $1.98{\times}10^{-8}\;C{\cdot}cm/J$였다.

Keywords

References

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