The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)
- Volume 50 Issue 6
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- Pages.271-275
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- 2001
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- 1229-246X(pISSN)
Preparation of 1-3 PZT Composites Fabricated Using Micro PMMA Mold
마이크로 PMMA몰드를 이용한 1-3 PZT Composite제조
- Park, Joon-Shik ;
- Cho, Jin-Woo ;
- Jung, Suk-Won ;
- Park, Soon-Sup ;
- Lee, Sun-Ho ;
- Kim, Dong-Hyun ;
- Han, Jin-Ho
- 박준식 (전자부품연구원) ;
- 조진우 (전자부품연구원) ;
- 정석원 (전자부품연구원) ;
- 박순섭 (전자부품연구원) ;
- 이선호 ((주)프로소닉 부설연구소) ;
- 김동현 ((주)프로소닉 부설연구소) ;
- 한진호 ((주)프로소닉 부설연구소)
- Published : 2001.06.01
Abstract
We investigated preparation of 1-3 PZT composites for medical ultrasonic transducer array (briefly UTA) using micro pressing method. The proposed process was using pressing PZT green sheet by PMMA micro mold obtained from X-ray lithography. Microstructures, electriacl and electro-mechanical properties of fabricated composites were analyzed. Dielectric constant at 1kHz and thickness mode electro-mechanical coupling coefficient of