Preparation of 1-3 PZT Composites Fabricated Using Micro PMMA Mold

마이크로 PMMA몰드를 이용한 1-3 PZT Composite제조

We investigated preparation of 1-3 PZT composites for medical ultrasonic transducer array (briefly UTA) using micro pressing method. The proposed process was using pressing PZT green sheet by PMMA micro mold obtained from X-ray lithography. Microstructures, electriacl and electro-mechanical properties of fabricated composites were analyzed. Dielectric constant at 1kHz and thickness mode electro-mechanical coupling coefficient of $6.2mm{\times}6.2mm{\times}422{\mu}m$ UTA sample were 1754 and 51%, respectively. Microstructures of sintered PZT showed dense and uniform. And PZT phases were well crystallized. Micro pressing method is a mass productive process in case of using injection molded PMMA by batch type LIGA process.