대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)
- 제50권6호
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- Pages.271-275
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- 2001
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- 1229-246X(pISSN)
마이크로 PMMA몰드를 이용한 1-3 PZT Composite제조
Preparation of 1-3 PZT Composites Fabricated Using Micro PMMA Mold
-
박준식
(전자부품연구원) ;
-
조진우
(전자부품연구원) ;
-
정석원
(전자부품연구원) ;
-
박순섭
(전자부품연구원) ;
- 이선호 ((주)프로소닉 부설연구소) ;
- 김동현 ((주)프로소닉 부설연구소) ;
- 한진호 ((주)프로소닉 부설연구소)
-
Park, Joon-Shik
;
-
Cho, Jin-Woo
;
-
Jung, Suk-Won
;
-
Park, Soon-Sup
;
- Lee, Sun-Ho ;
- Kim, Dong-Hyun ;
- Han, Jin-Ho
- 발행 : 2001.06.01
초록
We investigated preparation of 1-3 PZT composites for medical ultrasonic transducer array (briefly UTA) using micro pressing method. The proposed process was using pressing PZT green sheet by PMMA micro mold obtained from X-ray lithography. Microstructures, electriacl and electro-mechanical properties of fabricated composites were analyzed. Dielectric constant at 1kHz and thickness mode electro-mechanical coupling coefficient of