The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Measurements of the Mechanical Properties of Electroplated Gold Microstructure

전해 도금된 마이크로 금 구조물의 기계적 특성 측정

  • 백창욱 (서울대 반도체 공동연구소) ;
  • 김용권 (서울대 전기·컴퓨터공학부) ;
  • 안유민 (한양대 기계공학과)
  • Published : 2001.02.01
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Abstract

Mechanical properties of electroplated gold microstructures were determined from the micromachined beam structures. Cantilever and bridge beam structures of different length were fabricated by electroplating-surface micromachining technique, which is specially designed to realize an anchor structure close to an ideal fixed-boundary condition. Fabricated beams were electrostatically excited and their resonance frequencies were measured by optical system composed of laser displacement meter with dynamic signal analyzer. Young's modulus and mean residual stress were calculated from the measured frequencies of microbeams. In addtion, stress gradient was measured using deformation of released cantilever beam structure.

Keywords

References

  1. W. D. Nix, 'Mechanical properties of thin films,' Metallur. Trans. A, Vol. 20A, pp. 2217-2245, 1989
  2. F. R. Brotzen, 'Mechanical testing of thin films,' Int. Mater. Rev., Vol. 39, No. 1, pp. 24-44, 1994
  3. J. -H. Park, H. -T. Kim, Y. Kwon and Y. -K. Kim, 'A tunable millimeter-wave filter using coplanar waveguide and micromachined variable capacitors,' Digest of Papers, Transducer 99', Sendai, Japan, 1999, pp. 1272-1275
  4. J Y. Park, G. H. Kim, K. W. Chung and J U. Bu, 'Electroplated RF MEMS capacitive switch,' Proc. IEEE MEMS, Miyazaki, Japan, 2000, pp, 639-644 https://doi.org/10.1109/MEMSYS.2000.838593
  5. X. Y. Ye, Z. Y. Zhou, Y. Yang, J. H. Zhang and J. Yao, 'Determination of the mechanical properties of microstructures,' Sensors and Actuators, A 54, pp. 750-754, 1996 https://doi.org/10.1016/S0924-4247(97)80051-9
  6. S. Timoshenko, Theory of Plates and Shells, McGraw-Hill, New York, 1987, pp. 4-6, 118, 125
  7. P. M. Osterberg and S. D. Senturial, 'M-TEST : A test chip for MEMS material property measurement using electrostatically actuated test structures,' J. Microelectromech Syst., Vol. 6, No.2, pp. 107-118, 1997 https://doi.org/10.1109/84.585788
  8. S. Bouwstra and B. Geijselaers, 'On the resonance frequencies of microbridges,' Transducers 91', 1991, pp. 538-542
  9. H. A. C. Tillmans and R. Legtenberg, 'Electrostatically driven vacuum-encapsulated polysilicon resonators, Part II. Theory and performance,' Sensors and Actuators, A 45, pp. 67-84, 1994 https://doi.org/10.1016/0924-4247(94)00813-2
  10. W. Fang, 'Determining mean and gradient residual stresses in thin films using micromachined cantilevers,' J. Micromech Microeng., 6, pp. 301-309, 1996 https://doi.org/10.1088/0960-1317/6/3/002
  11. F. Ericson, S. Greek, J. Soderkvist and J. -A. Schweitz, 'High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation,' J. Mieromeeh Microeng., 7, pp, 30-36, 1997 https://doi.org/10.1088/0960-1317/7/1/006
  12. 백창욱, 김용권, '미세 도금틀 형성을 위한 폴리이미드이 이방성$O_2$ RIE 식각에 관한 연구,' 대한 전기학회 논문지, Vol. 46, No.2, pp, 298-300, 1997
  13. C. -W. Baek, Y. -K. Kim and Y. -M. Ahn, 'Mechanical property measurement of electroplated gold microstructure using resonance method,' Mat. Res. Soc. Symp. Proc. (to be published)
  14. J. J. -Y. Gill, L. V. Ngo, P. R. Nelson and C. -J. Kim, 'Elimination of extra spring effect at the step-up anchor of surface micromachined structure,' J. Microeleetromech Syst., Vol. 7, No.1, pp, 114-121, 1998 https://doi.org/10.1109/84.661393
  15. C. A. Neugebauer, J. Appl. Phys., 31(6), pp, 1096-1101, 1960 https://doi.org/10.1063/1.1735751
  16. T. P. Weihs. S. Hong, J. C. Bravman anp W. D. Nix, 'Mechanical· deflection. of cantilever· mictobeams : A new technique for testing the mechanical properties of thin films,' J. Mater. Res. 3(5).· pp. 931-942. 1988 https://doi.org/10.1557/JMR.1988.0931
  17. W. N. Sharpe Jr., D. A. Lavan. and R. L. Edwards, 'Mechanical properties of LIGA-deposited nickel for MEMS transducers,' Int. Conf. on Solid-State Sensors and Actuators (Transducers 97'). Chicago, June 1997, pp, 607-610 https://doi.org/10.1109/SENSOR.1997.613724
  18. M. F. Ashby and D. R. H. Jones, Engineering Materials 1, Pergamon, Oxford, 1980
  19. ACM/IEE Design Automation Conf. Estimation of Average Switching Activity in Combinational and Sequential Circuits A. Ghosh;S. Devadas;K. Keutzer;J. White