Abstract
A new type of modular mirror manipulator with independent adjustability was developed for the EPU6 beamline under construction at the Pohang Accelerator Laboratory. The mirror manipulator was designed so that the angular displacements of roll and pitch rotations do not introduce translational displacements and are independent with each other by positioning the mirror center to the center of a newly devised spherical joint. Manipulating its roll and pitch micrometers, the rotation angles of a dummy mirror were measured at an accuracy of 5 $\mu$rad using a gravity-referenced inclinometer. While the designed angular resolution was 3.937 $\mu$rad/$\mu\textrm{m}$, measured angular resolutions were 3.94 $\mu$rad/$\mu\textrm{m}$ for roll rotation and 3.85 $\mu$rad/$\mu\textrm{m}$ for pitch rotation. The effect of roll rotation on pitch angles was measured to be -3.18% and the effect of pitch rotation on roll angles was measured to be -5.21%. As the mirror manipulator was designed with emphases on independent adjustability and standardization, it results in eases of manufacturing, installation and adjustment as well as reductions of development period and design cost of mirror manipulators for various types of mirrors.
조정독립성을 갖춘 새로운 형식의 조립식 거울조정기가 포항가속기연구소에서 건설중인 EPU6 빔라인용으로 개발되었다. 새로이 고안된 구형관절의 회전 중심에 거울면 중심을 위치시켜, roll 및 pitch의 회전변위가 병진변위를 인가하지 않고 서로 독립적이도록 설계하였다. 거울조정기의 roll 및 pitch 마이크로메터를 조정하면서 중력기준형 각도기를 이용하여 임시거울의 회전각을 5 $\mu$rad의 정밀도로 측정하였다. 분해능의 설계치는 3.937 $\mu$rad/$\mu\textrm{m}$인데, 측정된 분해능은 roll 회전에 대해서 3.94 $\mu$rad/$\mu\textrm{m}$이었고 pitch 회전에 대해서는 3.85 $\mu$rad/$\mu\textrm{m}$이었다. pitch 각도에 대한 roll 회전의 영향은 -3.18%, roll 각도에 대한 pitch 회전의 영향은 -5.21%로 측정되었다. 본 거울조정기의 설계는 조정 독립성과 표준화에 중점을 두고 이루어짐으로써, 다종의 거울에 대한 거울조정기의 개발기간 단축과 설계비용 절감뿐만아니라 거울조정기의 제작, 설치 및 조정의 용이성을 도모할 수 있다.
