Journal of Korean Vacuum Science & Technology
- Volume 5 Issue 1
- /
- Pages.19-24
- /
- 2001
- /
- 1226-6167(pISSN)
Development and Test of ion Source with Small Orifice Cold Cathode
- G. E. Bugrov (Plasma Tech, Co.,Ltd.) ;
- S. K. Kondranin (Physical Faculty, Moscow state University) ;
- E. A. Kralkina (Physical Faculty, Moscow state University) ;
- V. B. Pavlov (Physical Faculty, Moscow state University) ;
- K. V. Vavilin (Physical Faculty, Moscow state University) ;
- Lee, Heon-Ju (Dept. of Nuclear & Energy Engineering, Cheju National University)
- Published : 2001.07.01
Abstract
The paper represents the results of the development and the test of "cold cathode" ion source model with 5 cm aperture where the glow discharge is utilized for generation of electrons in the cathode of the ion source. The results of probe measurements of the ion source are represented. The integral parameters such as electron energy distribution function(EEDF), electron density and mean electron energy, discharge voltage-current characteristics, and distribution of ion beam were studied.
Keywords