한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제34권5호
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- Pages.455-464
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- 2001
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
Role of Energy and Composition of Film-Forming Species in Formation of Composition and Structure of Compound Films
- Shaginyan, L.R. (Institute for Materials Science Problems of National Academy of Sciences of Ukraine)
- 발행 : 2001.10.01
초록
Effect of bombardment of the growing film by energetic particles on its properties is know over many years and is widely used for modification of the film properties. Despite of this there are no final answers on such questions as: what is the mechanism of compositional changes that take place for some compound films deposited under the ion bombardment, how the ion bombardment influences the epitaxial growth, what mechanisms govern the growth of the film on its early stages during deposition under the ion bombardment. The role of composition of film-forming species in formation of film structure is barely investigated or even not investigated at all. Experimental evidence and discussion of the influence of ion bombardment and composition of film-forming species on structure and composition of compound films are briefly considered in the review.
키워드