Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 34 Issue 5
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- Pages.384-390
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- 2001
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
Atmospheric Pressure Micro Plasma Sources
Abstract
The hollow cathode discharge is a kind of plasma formation scheme in which plasma is formed inside a hollow structure, the cathode, with current to a nearby anode of arbitrary shape. In this scheme, electrons reflex radially within the hollow cathode, establishing an efficient ionization mechanism for gas within the cavity. An existence condition for the hollow cathode effect is that the electron mean-free-path for ionization is of the order of the cavity radius. Thus the size of this kind of plasma source must decrease as the gas pressure is increased. In fact, the hollow cathode effect can occur even at atmospheric pressure for cathode diameters of order 10-100
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