Analyses of Oxide Scales Formed on TiCrN Coatings

TiCrN 박막의 고온 산화시 생성되는 산화막 분석

  • 이동복 (성균관대학교 플라즈마 응용표면기술 연구센터) ;
  • 이영찬 (성균관대학교 플라즈마 응용표면기술 연구센터) ;
  • 김성훈 (성균관대학교 플라즈마 응용표면기술 연구센터) ;
  • 권식철 (한국기계연구원)
  • Published : 2001.08.01

Abstract

The TiCrN Coatings haying three kinds of Compositions of $Ti_{36}$ $Cr_{26}$ $N_{38}$ , $Ti_{31}$ $Cr_{35}$ $N_{34}$ / and $Ti_{14}$ $Cr_{52}$ $N_{34}$ were deposited on STD 61 steel substrate by arc ion plating and were oxidized between 700 and 100$0^{\circ}C$ to identify the oxide scales formed on the coatings. The oxide scales were then analyzed using EPMA, XRD and GAXRD. During oxidation, the coatings consisting of TiN and CrN phases were reduced to TiO2 and $Cr_2$$O_3$, respectively. Titania tended to form at the outer oxide layer, whereas chromia tended to form at the inner oxide layer, owing to the different oxygen affinity. The substrate elements as well as coating elements diffused outwardly toward the oxide layer due to the concentration gradient. The growth of oxide from the TiCrN coatings was schematically expressed on the basis of thickness measurement of the reacted and unreacted coatings. The Cr element showed its stronger role to keep the TiCrN coatings from oxidation, when compared with Ni.

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