References
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- Silicon VLSI Technology J.D. Plummer.;M.D. Deal.;P.B. Griffin.
- Lithography 공정 기술 삼성전자 반도체 Memory 사업부
- Inside Prolith, a Comprehensive Guide to Optical Lithography Simulation C.A. Mark.
- Microlithography Science and Technology J.R. Sheats.;B.W. Smith.
- ASML's 3rd DUV Technical Symposium 130nm device patterining using KrF lithography I.S. Kim.;J.H. Lee.;J.L. Nam.;H.K. Cho.;J.T. Moon.
- 4th NGL Workshop Building Consensus International SEMATECH
- Technology Roadmap for Nanoelectronics European Commission.