전자공학회지 (The Magazine of the IEIE)

대한전자공학회 (The Institute of Electronics and Information Engineers)
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MEMS 기술과 정보기기 및 가전사업

  • 박재영 (LG전자기술원 마이크로시스템그룹)
  • 발행 : 2001.03.01
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키워드

참고문헌

  1. IEEE Trans. Electron Devices v.32 GaAs FET RF switches Gopinath A;Rankin J B
  2. IEEE Trans. Microwave Theor. Technol. v.43 High isolation and low insertion loss switch IC using GaAs MESFET's Ota Y;Sakakura M;Fujimoto K;Yamamoto S;Fujimoto H.
  3. IEEE Trans. Microwave Theor. Techniq. v.41 Monolithic GaAs HBT p-I-n diode variable gain amplifiers, attenuators, and switches Kobayashi K W;Oki A K;Umemoto D K;Claxton S K Z;Streit D C
  4. IBM J. Res. Dev. v.23 Micromechanical membrane switches on silicon Petersen K E
  5. J. Micromech. Microeng. v.9 Micromechanical relay with electrostatic actuation and metallic contacts Gr'etillat M-A;Gr' etillat F;de Rooij N F
  6. Tech. Digest, 8th Int. Conf. on Solid-State Sensors and Actuators A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz Yao J J;Chang M F
  7. Tech. Digest, Int. Conf. on Solid-State Sensors and Actuators Micromechanical relay with electrostatic actuation Schiele I;Huber J;Evers C;Hillerich B;Kozlowski F
  8. Int. J. RF Microwave CAE v.9 Surface-micromachined RF MEMS switches on GaAs substrates Hyman D(et al.)
  9. Electron. Lett. v.35 GaAs-compatible surface-micromachined RF MEMS switches Hyman D(et al.)
  10. Tech. Digest, IEEE Microwave Theory Techniques Symp. A micromachined RF microswitch applicable to phased-array antennas Suzuki K;Chen S;Marumoto T;Ara Y;Iwata R
  11. Proc. IMOC'99 (Rio de Janeiro, Brazil) Monolithic GaAs PHEMT MMICs integrated with high performance MEMS microrelays Sovero E A;Mihailovich R;Deakin D S;Higgins J A;Yao J J;DeNatale J F;Hong J H
  12. Tech. Digest, IEEE Microwave Theory and Techniques Symp. 30GHz tuned MEMS switches Muldavin J B;Rebeiz G M
  13. Tech. Digest, IEEE Microwave Theory and Techniques Symp. Micromechanical membrane switches for microwave applications Goldsmith C;Lin T-H;Powers B;Wu W-R;Norvell B
  14. Tech. Digest, IEEE Microwave Theory and Techniques Symp. Characteristics of micromachined switches at microwave frequencies Goldsmith C;Randall J;Eshelman S;Lin T-H;Denniston D;Chen S;Norvell B
  15. IEEE J. MEMS v.8 Micromachined low-loss microwave switches Yao Z J;Chen S;Eshelman S;Denniston D;Goldsmith C
  16. Tech. Digest, IEEE MTT-S Int. Microwave Symp. Micromachined electrostatic K-band switches Pacheco S;Nguyen C T;Katehi L P B
  17. IEEE $13^{th}$ International MEMS Conference Electroplated RF MEMS Capacitive Switches Jae Y. Park;Geun H. Kim;Ki W. Cheong;Jong U. Bu
  18. Tech. Digest, Solid State Sensor and Actuator Workshop A micromachined variable capacitor for monolithic low-noise VCOs Young D J;Boser B E
  19. Electron. Lett. v.33 Micromachined varactor with wide tuning range Dec A;Suyama K
  20. Proc. IEEE 12th Ann Int. Workshop on Micro Electro Mechanical Systems Flip-chip assembly for Sibased RF MEMS Harsh K F;Zhang W;Bright V M;Lee Y C
  21. Tech. Digest, IEEE Microwave Theory and Techniques Symp Micromachined RF MEMS Tunable Capacitors using Piezoelectric Actuators Jae Y. Park;Young J. Yee;Hyo J. Nam;Jong U. Bu
  22. Tech. Digest, Solid State Sensor and Actuator Workshop High tuning-ratio MEMS-based tunable capacitors for RF communications applications Yao J J;Park S;DeNatale J
  23. Micromachining & Microfabrication '98 Conference, SPIE v.3514 Micromachined High Q Inductors for High Frequency Applications Jae Y. Park;Mark G. Allen
  24. IEEE-MTT-S International Microwave Symposium Digest v.2 Low loss air-gap spiral inductors for MMICs using glass microbump bonding techniques J. Chuang;S. Ghazaly;N. Zein;G. Maracas;H. Gronkin
  25. IEEE Electron Devices Letters v.14 no.5 Large suspended inductors on silicon and their use in a 2㎛ CMOS RF amplifier J. Y. C. Chang;A. A. Abidi;M. Gaitan
  26. IEEE Microwave Guided Wave Letter v.1 The effect of air bridge height on the propagation characteristics of the microstrip M. E. Goldfarb;V. K. Tripathi
  27. IEEE Transactions on Component, Packaging, and Manufacturing Technology v.21 no.1 Surface micromachined solenoid inductors for high frequency applications Y. J. Kim;M. G. Allen
  28. IEEE Transactions on Magnetics v.29 no.6 Application of thin-film inductors to LC filters M. Yamaguchi;K. Ishihara;K. Arai
  29. International Journal of Microwave and Millimeter-Wave Computer-Aided Engineering v.4 no.2 CAD compatible accurate models of microwave passive lumped elements for MMIC applications V. Sadhir;I. Bahl;D. Willems
  30. 27th Annual IEEE Power Electronics Specialists Conference v.1 Lumped parameter models for single-and multiple-layer inductors A. Massarini;M. Kazimierczuk;G. Grandi
  31. IAS'96. IEEE Industry Applications Conference v.3 Stray capacitances of single-layer air-core inductors for high-frequency applications G. Grandi;M. Kazimierczuk;A. Massarini;U. Reggiani
  32. 41st Electronic Components and Technology Conference Multi-layer inductor for high frequency applications B. Breen
  33. IEEE-MTT-S International Microwave Symposium Digest A new transmission line approach for designing spiral microstrip inductors for microwave integrated circuits D. Cahana
  34. IEEE-MTT-S International Microwave Symposium Digest 2-6 GHz monolithic microwave amplifier W. O. Camp;S. Tiwari;D. Parson
  35. IEEE Trans. Parts, Hybrids and Packaging v.PHP-10 Design of planar rectangular microelectronic inductors H. M. Greenhouse
  36. Electrical Performance of Electronic Packaging A new closed form formula for inductance calculation in microstrip line spiral inductor design Ping Li
  37. Tele-Tech & Electronic Industries Printed inductors and capacitors H. Bryan
  38. IEEE Tran. Microwave Theory Tech. v.41 X-and thin film acoustic filters on GaAs R. B. Strokes;J. D. Crawfold
  39. IEEE Electron Device Letter v.20 no.3 The Fabrication of Thin-Film Bulk Acoustic Wave Resonators Employing a ZnO/Si Composite Diaphragm Structure Using Porous Silicon Layer Etching S. H. Kim;J. S. Lee;H. C. Choi;Y. H. Lee
  40. Proceedings of the 1993 IEEE MTT-S International Microwave Symposium v.5 High Q Microwave Acoustic Resonators and Filters K. M. Lakin;G. R. Kline;K.T. McCarron
  41. IEEE International Frequency Control Symposium Lateral-Field-Excitation Acoustic Resonators For Monolithic Oscillators and Filters W. W. Lau;Y. Song;E. S. Kim