투명 유전체 PbO-B$_2$O$_3$-${SiO_2}-{Al_2}{O_3}$의 물성 및 전극(ITO)과의 반응성 연구

Characteristics of transparent dielectric in PbO-B$_2$O$_3$-${SiO_2}-{Al_2}{O_3}$ system and investigation of reaction between dielectric and electrode(ITO)

  • 이재열 (경북대학교 금속공학과) ;
  • 홍경준 (경북대학교 금속공학과) ;
  • 김덕남 (순천대학교 재료금속공학과) ;
  • 김형순 (순천대학교 재료금속공학과) ;
  • 허증수 (경북대학교 금속공학과)
  • Lee, Jae-Yeol (Departments of Metallurgical Engineering, Kyungpook National University) ;
  • Hong, Gyeong-Jun (Departments of Metallurgical Engineering, Kyungpook National University) ;
  • Kim, Deok-Nam (Dept.of Materials Metallurgical Engineering, Sunchon National University) ;
  • Kim, Hyeong-Sun (Dept.of Materials Metallurgical Engineering, Sunchon National University) ;
  • Heo, Jeung-Su (Departments of Metallurgical Engineering, Kyungpook National University)
  • 발행 : 2001.04.01

초록

PDP용 투명유전체 재료로 사용되는 $PbO-B_2O_3-SiO_2-Al_2O_3$계의 소성과정 중에서 투명전극 (ITO)과의 반응성 및 광학적, 열적, 전기적 특성을 조사하였다. 본 연구에서 유전체막.두께는 12$\mu\textrm{m}$으로, 온도는 550-58$0^{\circ}C$에서 소성한 후 여러 물성을 평가하였다 그 결과로, 유전체와 투명전극(ITO)의 반용에서, In 이온이 유전체층으로 확산이동하였으며, Sn 확산은 거의 발생하지 않았다. 선팽창계수, 유전상수, 유리전이온도,광 투과율은 유전체 조성의 PbO 양에 큰 영향을 받았다. PbO양 증가는 선팽창계수와 유전상수를 증가시킨 반면, 유리전이온도와 광 투과율온 저하시켰다. $Al_2O_3/B_2O_3$ 비가 증가함에 따라서는 선팽창계수는 감소, 유전상수는 증가, 광 투과율은 감소하였으며, 유리 전이점 변화는 거의 나타나지 않았다.

$PbO-B_2O_3-SiO_2-Al_2O_3$, system was investigated for optical, thermal and electrical properties of transparent dielectric. We also studied the reaction between transparent dielectric and transparent electrode(Indium Tin Oxide, ITO) during firing. For the evaluation of properties, dielectrics were prepared under the conditions fired at 520~58$0^{\circ}C$ with 12$\mu\textrm{m}$ thickness. In the reaction between dielectrics and electrode(ITO), In ions diffused into dielectric layer, while Sn ion diffusion was not observed. The coefficient of thermal expansion, the dielectric constant, the glass transition temperature and the transmittance of the dielectric were greatly dependent on PbO content. The increase of the coefficient of thermal expansion and the dielectric constant were monitored by increasing PbO, while the glass transition temperature and the transmittance were decreased. With the increased $Al_2O_3/B_2O_3$ ratio, the coefficient of thermal expansion and the transmittance were decreased, while the dielectric constant was increased. The glass transition temperature did not change significantly.

키워드

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