초록
Nonlinear vibration characteristics of a piezoelectric-type micro actuator used for hard disk drives are experimentally studied. The nonlinear characterisitics include hysteresis, superharmonic resonance, jump phenomenon, and shifting of natural frequencies. The vibration modes and frequencies of the commercial actuator of the Hutchinson's Magnum series are measured using a laser vibrometer. From harmonic excitation to the PZT acturator, we observe interesting hysteresis patterns with 3 times input frequency. It is shown that the micro actuator has the typical 3 times superhamonic resonances coupled to the first torsional and sway modes of the suspension.