초록
A linear ultrasonic motor was designed by a combination of the first longitudinal and fourth bending mode, and the motor consisted of a straight aluminum alloys bar bonded with a piezoelectric ceramic element as a driving element. That is,$L_1-B_4$ linear ultrasonic motor can be constructed by a multi-mode vibrator of longitudinal and bending modes. Linear ultrasonic motors are based on an elliptical motion on the surface elastic body, such as bar or plates. In general, the natural resonance frequency of the stator is used as a driving frequency of the motor which provides a large elliptical motion. The corresponding eigenmode of one resonance frequency can be excited twice at the same time with a Phase shift of 90 degrees in space and time. And the rotation can be reversed by changing the phase between the two signals from sin$\omega$t to cos$\omega$t. Moreover, the tangential force pushes the slider(rotor) and, therefore, determines the thrust and speed of the motor. The experimental results of fabrication motors, bimorph-tyPe motor showed more excellent than unimorph-type. The maximum speed of TBL-200, TBL-300, TBL-400, TBL -220, TBL-310 and TBL-420 motors were 0.12, 0.37, 0.39, 0.14, 0.55 and $0.60ms6{-1}$, respectively. And the efficiency were reported 1.15, 7.9, 6.6, 2.36, 10.1 and 16.5%, respectively. That time, output thrust of the motor was a strong(1~2N) and the weight of stator was a lightness(5~7g).
