Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Eco-process in a Semiconductor Manufacturing Process

반도체 공정에서의 환경친화형 프로세스

  • Jeong, Hae-Do (Dept.of Precision Mechanical Engineering, Busan National University) ;
  • Kim, Ho-Youn (Dept.of Precision Mechanical Engineering, Busan National University)
  • 정해도 (부산대학교 정밀기계공학과) ;
  • 김호윤 (부산대학교 정밀기계공학과)
  • Published : 2001.09.01
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References

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