참고문헌
- Transducers '95 LIGA and related technologies for industrial application W.Menz
- J. Micromech. Microeng. v.5 High-rate directional deep dry etching for bulk silicon micromachining M.Esashi;M.Takinami;Y.Wakabayashi;K.Minami
- Sensors and Actuators v.73 3D microfabrication by combining microstereolithography and thick resist UV lithography A.Bertsch;H.Lorenz;P.Renaud
- MEMS 2000 Fluid drive chips containing multiple pump and switching valves for biochemical IC family Koji Ikuta;Tadahiro Hasegawa;Takao Adachi;Shoji Maruo
- MEMS 2001 3D micromixers-downscaling large scale industrial static mixers Arnaud Bertsch;Staphan Heimgartner;Peter Cousseau;Philippe Renaud
- MEMS 2000 An intergrated micro-electrophoretic chip fabricated using a new stereolithographic process Yoshiaki Mizukami;Daniel Rajniak;Masatoshi Nishimura
- MEMS 2001 In-chip cell-free protein synthesis from DNA by using biochemical IC chip Koji Ikuta;Atsushi Takahashi;Shoji Maruo
- 전기전자재료학회논문지 v.14 no.2 새로운 ICP 장치를 이용한 고온 초전도체의 dry etching과 기존의 wet etching 기술과의 비교 강형곤;임성훈;임연호;한윤봉;황종선;한병성
- 전기전자재료학회논문지 v.14 no.2 단결정 6H-SiC의 광전 화학습식식각에 대한 연구 송정균;정두찬;신무환
- 전기전자재료학회논문지 v.14 no.3 전기화학적 식각정지에 의한 고수율 실리콘 박막 멤브레인제작 정귀상;박진성;이원재;송재성
- 한국센서학회지 v.10 no.4 Stereolithography 기술을 이용한 마이크로 펌프 제작 이영태;서희돈
- Microelectromechanical System(MEMS)ASME 1997 Design high-performance micro-pumps based on no-moving-parts valves Ron L.Bard;Nigel R.Sharma;Fred K.Forster;Martin A.Afromowitz;Robert J.Penney
- Sensors and Actuators v.A46-47 A valve-less planar fluid pump with two pump chamber Anders Olsson;Goran Stemme;Erik stemme
- Micro Total Analysis System '98 Micromixer incorporated with piezoelectrically driven valveless micropump Z.Yang;H.Goto;M.Matsumoto;T.Yoda
- Technical Digest of the 9th Sensor Symposium Photoetching and electrochemical discharge drilling of pyrex glass Shuichi Shoji;Masayoshi Esashi
- 한국전기전자재료학회추계학술대회 논문집 v.14 no.1 전해 방전법에 의한 유리의 미세 구멍 가공 이환훈;이영태