대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

$(Sr_{1-x}Ca_x)TiO_3$세라믹 박막의 미세구조 및 특성

Microstructure and Properties of $(Sr_{1-x}Ca_x)TiO_3$Ceramic Thin film

  • Kim, Jin-Sa (Dept.of Electrical Engineering, Kwangwoon University) ;
  • Lee, Jun-Ung (Korea Electric Electronic Material Society)
  • 발행 : 2001.10.01
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초록

The$(Sr_{1-x}Ca_x)TiO_3$(SCT) thin films are deposited on Pt-coated electrode $(Pt-TiN /SiO_2Si)$ using RF sputtering method at various deposition temperature. The crystallinity of thin films was increased with increased of deposition temperature n the temperature range of 200~500 $[^{\circ}C]$. The capacitance changes almost linearly in temperature ranges of -80~+90$[^{\circ}C]$. All SCT thin films used in the study the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200[kHz]. V-I characteristics of SCT thin films show the increasing leakage current with the increases of deposition temperature.

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참고문헌

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