참고문헌
- Sensors and Actuators A v.31 Resonant Pressure Sensor Based on Piezoelectric Properties B. Morten;G. D. Cicco;M. Prudenziati
- J. Micromech. Microeng. v.9 Processing of PZT Piezoelectric Thick Films on Silicon for Micromechanical Systems S. P. Beeby;A. Blackburn;N. M. White
- Sensors and Actuators A v.71 Improved Preparation Procedure and Properties for a Mutilayer Piezoelectric Thick-film Actuator K. Yao;W. Zhu
- Surface and Coatings Technology v.76-77 Thick Ceramic Coating Using a Sol Gel Based Ceramic 0-3 Composite D. A. Barrow;T. E. Petroff;M. Sayer
- Materials Letters v.31 Thick-film Printing of PZT onto Silicon R. Mass;M. Koch;N. R. Harris;N. M. White;A. G. R. Evans
- Meas. Sci. Technol. v.8 Thick-film densification for pyroelectric sensors C. Lucat;F. Menil;R. V. D. Muhll
- Intergrated Ferroelectrics v.24 Piezoelectric Properties of Lead Zirconate Titanate Thin Films Characterized by the Pneumatic Loading Method D. G. Kim;H. G. Kim