참고문헌
- Bulletin of Korean Institute of Electrical and Electronic Material Engineers v.11 no.2 DRAM 기술의 발전 및 커패시터 재료의 연구 동향 이병수
- Current Opinion in Solid State and Materials Science v.4 no.1 Ferroelectric Films and Devices A. I. Kingon;S. K. Streiffer
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J. Kor. Ceram. Soc.
v.32
no.4
Characterization of Electric Properties of
$Ba_{0.65}Sr_{0.35}TiO_3$ Thin Film Deposited by RF Magnetron Sputtering K.D. Yang;H.J. Cho;H.S. Cho;H.J. Kim - Mater. Sci. and Eng. B. v.56 no.2-3 (Ba,Sr)TiO₃ Thin Films for Ultra Large Scale Dynamic Random Access Memory. A Review on the Process Integration C.S. Hwang
- J. of Sol-Gel Sci & Tech v.16 no.1-2 Low-temperature Reparation of (Ba,Sr)TiO₃Perovskite Phase by Sol-gel Method H. Shiibashi;H. Matsuda;M. Kuwabara
- Jpn. J. of Appl. Phys. Part 2-Letters v.38 no.2B Low Temperature Chemical Vapor Deposition of (Ba,Sr)TiO₃ Thin Films for High Density Dynamic Random Access Memory Capacitors J.H. Joo;J.B. Park;Y. Kim;K.S. Lee;J.S. Lee;J.S. Roh;J.J. Kim
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Mater. Sci. and Eng. B.
v.57
no.2
Study of the Electrical Properties of Pulsed Laser Ablated
$(Ba_{0.5}Sr_{0.5})TiO_3$ Thin Films S. Saha;S.B. Krupanidhi - Proceedings of the International Conference on Electrical Engineering v.1 A Study on the Electrical Properties of (Ba,Sr)TiO₃Thin Films Fabricated by the RF Sputtering Technique Y.H. Lee;M.K. Lee;K.W. Ryu;S.G. Bae
- Proceedings of the Electron Devices Meeting A Manufacturable Integration Technology of Sputter-BST Capacitor with a Newly Proposed Thick Pt Electrode Y. Tsunemine;T. Okudaira;K. Kashihara;K. Hanafusa;A. Yutaini;Y. Fujita;M. Matsushita;H. Itoh;H. Miyoshi
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Jpn. J. of Appl. Phys. Part 2-Letters
v.36
no.7A
Structural and Electrical Properties of
$Ba_{0.5}Sr_{0.5}TiO_3$ films on Ir and IrO₂Electrodes H.J. Cho;C.S. Kang;C.S. Hwang;J.W. Kim;H. Horii;B. T. Lee;S.I. Lee;M.Y. Lee - Applied Physics Letters v.74 no.21 (Ba,Sr)TiO₃Thin films with Conducting Perovskite Electrodes for Dynamic Random Access Memory Applications B. Nagaraj;T. Sawhney;S. Perusse;S. Aggarwal;R. Ramesh;V.S. Kaushik;S. Zafar;R.E. Jones;J.H. Lee;V. Balu;J. Lee
- J. Kor. Ceram. Soc. v.34 no.8 BST 축적박막의 누설전류 평가 인태경;안건호;백성기
- Materials Chemistry and Physics v.61 no.2 Bottom Electrode Dependence of the Properties of (Ba, Sr)TiO₃Thin Film Capacitors Y.C. Choi;B.S. Lee
- 한국전기전자재료학회지 v.12 no.12 BST 박막의 RTA에 따른 전기적 특성 전장배;김덕규;박춘배
- Jpn. J. of. Appl. Phys. v.32 Dielectric Properties of (Ba, Sr)TiO₃Thin Films Deposited by RF Sputtering T. Horokawa;N. Mikami;T. makita;J. Tanimura;M. Kataoka;K. Sato;M. Nunoshita
- J. Kor. Ceram. Soc. v.36 no.4 Dielectric and Pyroelelctric Properties of (Ba, Sr)TiO₃Thin Films by RF Magnetron Sputtering J.S. Park;J.S. Kim;J.H. Lee;Y.H. Lee;S.R. Han;J.S. Lee
- J. of. Appl. Phys. v.86 no.1 Dielectric and Electrical Properties of Sputter Grown (Ba, Sr)TiO₃Thin Films J.C. Shin;J.Park;C.S. Hwang;H.J. Kim
- J. of the Electroche. Soc. v.145 no.8 Conduction Mechanism and Temperature-dependent Current-voltage in (Ba, Sr)TiO₃Thin Films M.S. Tsai;T.Y. Tseng
- J. of. Appl. Phys. v.85 no.4 Variations of the Leakage Current Density and the Dielectric Constant of Pt/(Ba, Sr)TiO₃/Pt Capacitors by Annealing under a N₂Atmosphere C.S. Hwang;S.H. Joo