Design of ultra high speed ellipsometer using division-of-amplitude-photopolarimeter

Division-of-Amplitude-Photopolarimeter를 이용한 초고속 타원계의 설계

  • Published : 2001.06.01

Abstract

The design of an ultra fast ellipsometer is suggested. It adopts the division-of-amplitude-photopolarimeter (DOAP) as the polarization state detector. It does not utilize any moving part such as the rotating polarizer(analyzer) or even any electronic modulation part like the piezo-electric phase modulator. Hence the time resolution of the present system is limited only by the response time of the photo-detector and electronic circuit as well as the analog-digital converter. The feasibility of the suggested ultra fast ellipsometer was tested and the response time with nano-second time resolution has been verified. Its future application to the investigation of kinetics including that of the phase-change optical recording media like GezSb2 Tes is discussed. ussed.

편광자나 검광자가 장착된 모터를 회전시키는 기계적인 변조방식이나 압전소자에 조화진동하는 교류전압을 가하는 위상변조방식에 기초를 둔 일반적인 편광변조 및 편광상태 측정 방식에 의존하지 않고 움직이지 않는 광분할기와 편광자를 통과한빛의 세기를 측정하는 DOAP 방식으로 편광상태를 측정하기 때문에 광검출소자 및 전자회로의 반응시간에 의해 그 신간분해능이 결정되는 새로운 방식의 초고속 다원계를 설계하였다. 이 초고속 타원계는 수 ns의 시간분해능을 가지고 있음을 확인하였으며 상변화기구 같은 동적기구를 연구하는 도구로의 응용 가능성을 검토하였다.

Keywords

References

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