Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Ultra Precision Displacement Measuring System Using the Detection of Fringe Peak Movement

간섭무늬 최대점 이동량의 감지를 이용한 초정밀 변위 측정 시스템

  • Yi, Jong-Hoon (Dept. of Mechanical Engineering, Graduate School of Korea Advanced Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kwak, Yoon-Keun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 이종훈 (한국과학기술원 기계공학과 대학원) ;
  • 김수현 (한국과학기술원 기계공학과) ;
  • 곽윤근 (한국과학기술원 기계공학과)
  • Published : 2001.06.01
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Abstract

This paper proposes a precision displacement measuring method of detecting fringe movement of interferograms with a nanometric resolution. It is well known that the laser interferometer plays a useful and essential role in scientific and industrial application, but they have such error sources as an unequal gain of detectors, imbalanced beams, and lack of quadrature. These error sources degrade the accuracy of the interferometer. However, the fringe movement of interferograms has little relation with these error sources. In order to investigate performance of the proposed method. analysis and simulation were executed over random noise and wavefront distorion. Results of the simulation show that the proposed method is robust against these errors. Experiment was implemented to verify this method.

Keywords

References

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