Meso-Measurement Technology and Its Industrial Importance

메조 측정기술의 산업적 중요성

  • Kim, Seung-Woo (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 김승우 (한국과학기술원 기계공학과)
  • Published : 2001.01.01

Abstract

Keywords

References

  1. Manufacturing three-dimensional components and devices at the Meso and Micro scales, a NIST/NSF workshop, May 1999
  2. ATP workshop on MEMs, November 1999
  3. NC/Israel workshop: Micro-Electro-Mechanical Systems technology, design and application, May 2000
  4. T. Masuzawa, 'State of the art of micromachining,' CIRP keynote, August 2000 https://doi.org/10.1016/S0007-8506(07)63451-9
  5. H. Van Brussel et al, 'Assembly of Microsystems,' CIRP keynote, August 2000 https://doi.org/10.1016/S0007-8506(07)63450-7
  6. MST news, various editions, 2000