Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication of Two-Dimensional Array Hydrophones and Application to Ultrasonic Field Measurement

2차원 배열 수중청음기의 제작과 초음파 음장 측정에의 응용

  • Ha, Kang-Lyeol (Department of Physics, Pukyong National University) ;
  • Kim, Moo-Joon (Department of Physics, Pukyong National University) ;
  • Kang, Gab-Joong (Department of Physics, Pukyong National University) ;
  • Hyun, Byung-Gook (Interdiciplinary Program of Acoustics and Vibration Engineering, Pukyong National University) ;
  • Chae, Min-Ku (Interdiciplinary Program of Acoustics and Vibration Engineering, Pukyong National University) ;
  • Imano, Gazuhiko (Department of Electrical and Electronic Engineering, Akita University)
  • 하강열 (부경대학교 물리학과) ;
  • 김무준 (부경대학교 물리학과) ;
  • 강갑중 (부경대학교 물리학과) ;
  • 현병국 (부경대학교 대학원 음향진동공학협동과정) ;
  • 채민구 (부경대학교 대학원 음향진동공학협동과정) ;
  • 금야화언 (일본 추전대학 전기전자공학과)
  • Published : 2001.09.30
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Abstract

Two-dimensional array hydrophones with $8{\times}8$ elements were designed and fabricated using the PVDF(Polyvinylidene fluoride) piezoelectric film, and the method and system for ultrasonic field measurement in several MHz $\sim$ tens of MHz band using the hydrophones was established. The characteristics of frequency response relating to the backing materials were analyzed with the Mason equivalent circuit for design, and the accuracy of ultrasonic field measurement relating to the sizes and kerfs of piezoelectric elements was discussed. Good results of the measurement of ultrasonic field formed by a circular plane transducer of 2.25MHz in water were obtained by the system with the array hydrophones.

PVDF(Polyvinylidene fluoride) 압전막을 이용하여 $8{\times}8$의 요소를 갖는 2차원 배열 수중청음기를 설계 제작하고. 그것을 이용하여 수 MHz$\sim$수십 MHz 대역의 초음파 음장을 측정하는 방법 및 측정시스템을 구축하였다 수중청음기의 설계에 있어서는 배면체의 종류에 따른 주파수 응답특성을 Mason 등가회로에 의해 해석하였고, 압전체 요소의 크기 및 간격, 스캐닝 스탭에 따른 음장 측정 정도를 검토하였다 2.25MHz의 원형평면 트랜스듀서가 만드는 수중 음장을 제작한 수중청음기 및 측정시스템으로 측정한 결과, 비교적 정밀한 측정이 가능함을 알았다.

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