열처리공학회지 (Journal of the Korean Society for Heat Treatment)
- 제13권6호
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- Pages.398-404
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- 2000
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- 1225-1070(pISSN)
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- 2508-4046(eISSN)
직류 및 고주파 마그네트론 스퍼터링법으로 증착한 Ti-Al-V-N 박막의 특성
Characterizations of Ti-Al-V-N Films Deposited by DC and RF Reactive Magnetron Sputtering
- Sohn, Yong-Un (Minerals & Materials Division, Korea Institute of Geology, Mining & Materials (KIGAM)) ;
- Chung, In-Wha (Minerals & Materials Division, Korea Institute of Geology, Mining & Materials (KIGAM)) ;
- Lee, Young-Ki (Department of Semiconductor Engineering, Ui-Duk University)
- 투고 : 2000.09.28
- 발행 : 2000.11.30
초록
The Ti-Al-V-N films have been deposited on various substrates by d.c and r.f reactive magnetron sputtering from a Ti-6Al-4V alloy target in mixed