Journal of the Institute of Electronics Engineers of Korea SD (대한전자공학회논문지SD)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Fabrication of Semiconductor Gas Sensor Array and Explosive Gas-Sensing Characteristics

반도체 가스 센서 어레이의 제작 및 폭발성가스 감응 특성

  • Lee, Dae-Sik (School of Electronic & Electrical Engineering Kyungpook National University) ;
  • Jung, Ho-Yong (School of Electronic & Electrical Engineering Kyungpook National University) ;
  • Ban Sang-Woo (Sensor Technology Research Center, Kyungpook National University) ;
  • Lee, Min-Ho (Sensor Technology Research Center, Kyungpook National University) ;
  • Huh, Jeung-Soo (Metallurgical Engineering, Kyungpook National University) ;
  • Lee, Duk-Dong (School of Electronic & Electrical Engineering Kyungpook National University)
  • 이대식 (慶北大學校 電子電氣工學部) ;
  • 정호용 (慶北大學校 電子電氣工學部) ;
  • 반상우 (慶北大學校 센서기술연구소) ;
  • 이민호 (慶北大學校 센서기술연구소) ;
  • 허증수 (慶北大學校 金屬工學科) ;
  • 이덕동 (慶北大學校 電子電氣工學部)
  • Published : 2000.11.01
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Abstract

A sensor array with 10 discrete sensors integrated on a substrate was developed for discriminating the kinds and quantities of explosive gases. The sensor array consisted of 10 oxide semiconductor gas sensors with $SnO_2$ as base material and had broad sensitivity to specific gas. The sensor array was designed with uniform thermal distribution and had also high sensitivity and reproductivity to low gas concentration through nano-sized sensing materials with different additives. By using the sensitivity signal of the sensor array at $400^{\circ}C$, we could reliably discriminate the kinds and quantities of explosive gases like butane, propane and methane under the lower explosion limit through the principal component analysis (PCA) method.

폭발성 가스의 종류 및 그 양을 검지하기 위한 10개의 개별 센서가 한 기판위에 집적된 센서어레이를 개발했다. 이 센서어레이는 각종 가스에 대해 다양한 감도 패턴을 가지며, $SnO_2$를 모물질로 하는 10개의 산화물 반도체 가스센서로 구성하였다. 나노사이즈이며 큰 비표면적을 가진 모물질에 서로 다른 첨가물을 첨가하여 감지물질를 제작함으로써 저농도에 대한 감도 및 재현성을 높였고, 센서어레이 전반에서 균일한 온도 분포가 되도록 설계하였다. $400^{\circ}C$에서 동작하는 센서어레이로부터 얻은 감도를 이용하여 주성분 분석 기법을 통해 폭발 하한값의 범위에서 부탄, 프로판 그리고 메탄 등과 같은 폭발성 가스의 종류 및 양을 신뢰성 있게 식별할 수 있었다.

Keywords

References

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