공차제어를 위한 인프로세스 계측 자기센서의 개발 연구

Research md Development of Inprocess Measuring Magnetic sensor for Tolerance Control

This paper shows the study for development inprocess measuring magnetic sensor for tolerance control, First, we fabricated and annealed sample amorphous ribbons which were made of ($CO_{0.94}$$Fe_{0.06}$)$_{79}$$Si_{2}$$b_{19}$ having near zero magnetostrictive. It had 12［$\mu\textrm{m}$］ of thickness, 10［mm］ of length, and 2.5［mm］ of width. Then, we measured the magnetic characteristics such as frequency dependency over impedance variation rate and position change over impedance variation. As the results of the evaluation, we found that the sample ribbons had excellent sensor characteristics. Then, we made sensors by using the sample ribbons, As the results of the measurements, it proved that the ribbon could be used as excellent magnetic sensor for which it was possible to control inprocess measurement within the tolerance range(~$\mu\textrm{m}$ ).