Journal of Korean Vacuum Science & Technology
- 제4권2호
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- Pages.55-60
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- 2000
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- 1226-6167(pISSN)
Effects of Input Gases on the Growth Characteristics of Vertically Aligned Carbon Nanotubes in Plasma Enhanced Hot Filament Chemical Vapor Deposition
- Han, Jae-Hee (School of Metallurgy and Materials Engineering Sungkyunkwan University) ;
- Yang, Ji-Hun (Department of Physics, Sungkyunkwan University) ;
- Yang, Won-Suk (School of Metallurgy and Materials Engineering Sungkyunkwan University) ;
- Yang, Cheol-Woong (School of Metallurgy and Materials Engineering Sungkyunkwan University) ;
- Yoo, Ji-Beom (School of Metallurgy and Materials Engineering Sungkyunkwan University) ;
- Park, Chong-Yun (Department of Physics, Sungkyunkwan University)
- 발행 : 2000.06.01
초록
Vertically aligned carbon nanotubes on nickel coated glass substrates were obtained at low temperatures below 600
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