Journal of Korean Vacuum Science & Technology
- 제4권1호
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- Pages.18-22
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- 2000
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- 1226-6167(pISSN)
Enhancement of the nucleation density for diamond film on the pretreated glass substrate by the application of cyclic modulation of the source-gas flow rate
- Kim, T.-G. (Department of Materials Engineering, Miryang University) ;
- Kim, S.-H. (Department of New Materials Chemistry, Silla University) ;
- Kim, Y.-H. (Department of Physics, Korea University)
- 발행 : 2000.03.01
초록
For the enhancement of the nucleation density of the diamond film, we introduced the cyclic process. The cyclic process was carried out by the on/off control of CH
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