참고문헌
- G. Groeseneken, H. E. Maes, J. Van Houdt and J. S. Witters, Nonvolatile Semiconductor Memory Technology, IEEE press, p. 1, 1997
- J. F. Scott and C. A. Araujo, 'Ferroelectric memories', Science, vol. 246, pp. 1400-1405 , December 1989 https://doi.org/10.1126/science.246.4936.1400
- J. F. Scott, L. D. McMillan and C. A. Araujo, 'Ferroelectric memories : a comparison with other high-speed digital devices', Ferroelectrics, vol. 116, pp. 147-155, 1991
- J. Carrano, C. Sudhama, V. Chikannane, J. Lee, Al Tasch, W. Shepherd and N. Abt, 'Electrical and reliability properties of PZT thin films for ULSI DRAM applications', IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, vol. 38, no. 6, pp. 690-703, 1991 https://doi.org/10.1109/58.108871
- P. C. Fazan, 'Trends in the Development of ULSI DRAM Capacitors', Integrated Ferroelectrics, vol. 4, pp. 247-253, 1994 https://doi.org/10.1080/10584589408017028
- R. E. Jones, JR, P. D. Maniar, A. C. Campbell, R. Moazzami and C. J. Mogab, 'High-permittivity lead based perovskite dielectrics for DRAM applications', Integrated Ferroelectrics, vol. 5, pp. 235-244, 1994 https://doi.org/10.1080/10584589408017017
- S. Sinharoy, H. Buhay, D. R. Lampe, and M. H. Francombe, 'Integration of Ferroelectric Thin Films into Nonvolatile Memories', J. Vac . Sci. Tech. A, vol. 10, no. 4, pp. 1554-1561, 1992 https://doi.org/10.1116/1.578044
- L. E. Cross, Ferroelectric Ceramics, Birkhauser, Bassel, p. 1, 1993
- J. Chen, M. P. Harmer, and D. M. Smith, 'Polarization Fatigue in Perovskite Ferroelectric Ceramics and Thin Films', in Proc. of 4th International Symposium on Integrated Ferroelectrics, pp. 111-115, 1992 https://doi.org/10.1109/ISAF.1992.300637
- M. V. Raymond, J. Chen, and D. M. Smith, 'Degradation of Ferroelectric Thin Films : A Defect Chemistry Approach', Integrated Ferroelectrics, vol. 5, pp. 73-78, 1994 https://doi.org/10.1080/10584589408018681
-
Xiaofeng Du and I-Wei Chen, 'Fatigue of
$Pb(Zr_{0.53}Ti_{0.47})O_3$ Ferroelectric Thin Films', J Appl. Phys., vol. 83, no. 12, pp. 7789-7798, 1998 https://doi.org/10.1063/1.367953 - B. M. Melnick, C. A. paz de Araujo, L. D. McMillan, D. A. Carver and J. F. Scott, 'Recent Results on Switching, Fatigue and Electrical Characterization of Sol-gel Based PZT Capacitors', Ferroelectrics, vol. 116, pp. 79-83, 1991 https://doi.org/10.1080/00150199108007931
- D. M. Smyth, 'Charge Motion in Ferroelectric Thin Films', Ferroelectrics, vol. 116, pp. 117-124, 1991 https://doi.org/10.1080/00150199108007935
- S. B. Desu and I. K. Yoo, 'Electrochemical Models of Failure in Oxide Perovskites', Integrated Ferroelectrics, vol. 3, pp. 365-376, 1993 https://doi.org/10.1080/10584589308216692
- R. Waser and M. Klee, 'Theory of Conduction and Breakdown in Perovskite Thin Films', Integrated Ferroelctrics, vol. 2, pp. 23-40, 1992 https://doi.org/10.1080/10584589208215729
- H. M. Duiker, P. D. Beale, J. F. Scott, C. A. paz de Arujo, B. M. Melnick, J. D. Cuchiaro and L. D. McMillan, 'Fatigue and switching in ferroelectric memories: theory and experiment', J. Appl. Phys., vol. 8, no. 11, pp. 5783-5791, December 1990 https://doi.org/10.1063/1.346948
- J. F. Scott, C. A. Araujo, H. Brett Meadows, L. D. McMillan and A. Shawabkeh, 'Radiation effects on ferroelectric thin-film memories : retention failure mechanisms', J. Appl. Phys., vol. 66, no. 3, pp. 1444-1453, August 1989 https://doi.org/10.1063/1.344419
- B. P. Maderic, L. E. Sanchez and S. Y. Wu, 'Ferroelectric switching, memory retention and endurance properties of very thin PZT thin films', Ferroelectrics, vol. 116, pp. 65-77, 1991 https://doi.org/10.1080/00150199108007930
- In. K. Yoo, C. J. Kim and S. B. Desu, 'Retentivity studies of lead zirconate titanate thin film capacitors', Mat. Res. Soc. Symp. Proc., vol. 433, pp. 273-278, 1996
-
Z. G. Zhang, Y. N. Wang, J. S. Zhu, F. Yan, X. M. Lu, H. M. Shen, and J. S. Liu, 'Retention characteristics of
$SrBi2Ta2O_9$ thin films prepared by metalorganic decomposition', Appl, Phys. Lett., vol. 73, no. 25, pp. 3674-3676, December 1998 https://doi.org/10.1063/1.122859 - 이장식, 'PZT 박막에서 거대 단결정립 형성을 위한 선택적 핵생성에 관한 연구', 공학석사학위논문, 서울대학교, 1999
- 이장식, 박응철, 박정호, 이병일, 주승기, 'PZT seed에 의한 거대 단결정립 PZT 박막 형성에 관한 연구', 대한금속학회지, vol. 38. no.1. pp. 148-152, January 2000
- S. M Sze, VLSI Technology, McGraw-Hill, p. 612
- S. M. Sze, VLSI Technology, McGraw-Hill, p. 639
- 'FM24C16-data retention characterization', RAMFRON technology note, August 1998