Orientation Control of $SrBi_2Ta_2O_9$ Thin Films on Pt (111) Substrates

  • Published : 2000.06.01

Abstract

The a-axis and c-axis prefer oriented SBT thin films could be deposited on Pt(111)/Ti/$SiO_2$$650^{\circ}C$). The c-axis preferred orientation of SBT film can be obtained by Sr deficiency and high compressive stress. However, the a-axis-oriented grains can be formed under stoichiometric Sr content and nearly stress-free state.

Keywords

References

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