Crystallographic Relationships of (Ba, Sr) $TiO_3$Thin Film Prepared by Metal-Organic Chemical Vapor Deposition on (111) Textured Pt Electrode

  • Yoo, Dong-Chul (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Lee, Jeong-Yong (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)
  • Published : 2000.11.01

Abstract

The crystallographic orientations of $Ba_{0.6}$S $r_{0.4}$Ti $O_3$(BST) thin film deposited by a metal-organic chemical vapor deposition on (111) textured Pt electrode were studied with a transmission electron microscopy. The fully crystallized BST thin film (50nm) has (100) and (110) preferred orientations. A high resolution transmission electron microscopy study has revealed the crystallographic orientation relationships between BST thin film and Pt electrode. These relationships explained the preferred orientation of BST film on (111) textured Pt electrode. With these results, we could represent the atomic arrangement at the BST/Pt interface.e.e.

Keywords

References

  1. Thin Solids Films v.305 Studies on Structural and Electrical Properties of Barium Strontium Titanate Thin Films Developed by Metallo-Organic Decomposition S. B. Krupanidhi;C. J. Peng
  2. J. Appl. Phys. v.83 A Comparative Study on the Electrical Conduction Mechanism of ($Ba_{0.5}Sr_{0.5}$)TiO₃ Thin Films on Pt and IrO₂ Electrodes C. S. Hwang;B. T. Lee;C. S. Kang;J. W. Kim;K. H. Lee;H. J. Cho;H. Horii;W. D. Kim;S. I. Lee;Y. B. Roh;M. Y. Lee
  3. J. Appl. Phys. v.82 no.5 Characterization of Sputtered Barium Strontium Titanate and Strontium Titanate Thin Films B. A. Baumert;L. H. Chang;A. T. Matsuda;T. L. Tsai;C. J. Tracy;R. B. Gregory;P. L. Fejes;N. G. Cave;W. Chen(et. al.)
  4. Jpn. J. Appl. Phys. v.36 Preparation and Dielectric Properties of the Multilayer Capacitor with (Ba,Sr)TiO₃ Thin Layers by Metalorganic Chemical Vapor Deposition Y. Takeshima;K. Shiratsuyu;H. Takagi;Y. Sakabe
  5. J. Appl. Phys. v.82 no.5 Leakage Currents in $Ba_{0.7}Sr_{0.3}$TiO₃ Thin Films for Ultrahigh-Density Dynamic Random Access Memories G. W. Dietz;M. Schumacher;R. Waser;S. K. Streiffer;C. Basceri;A. I. Kingon
  6. Jpn. J. Appl. Phys. v.33 Heteroepitaxial Growth of Quaternary $Ba_xSr_{1-x}$TiO₃ Thin Films by ArF Excimer Laser Ablation H. Kobayashi;T. Kobayashi
  7. Jpn. J. Appl. Phys. v.35 Electrical and Microstructural Degradation with Decreasing Thickness of (Ba,Sr)TiO₃ Thin Films Deposited by RF Magnetron Sputtering S. H. Paek;J. H. Won;K. S. Lee;J. S. Choi;C. S. Park
  8. Jpn. J. Appl. Phys. v.37 Ferroelectric Properties of SrRuO₃/(Ba,Sr)TiO₃/SrRuO₃ Epitaxial Capacitor T. Kawakubo;S. Komatsu;K. Abe;K. Sano;N. Yanase;N. Fukushima
  9. Appl. Phys. Lett. v.72 no.22 Crystallization of Amorphous (Ba,Sr)TiO₃/MgO(001) Thin Films D. Y. Noh;H. H. Lee;T. S. Kang;J. H. Je
  10. IEDM. v.30 no.2 All Perovskite Capacitor (APEC) Technology for (Ba,Sr)TiO₃ Capacitor Scaling toward 0.10 μm Stacked DRAMs K. Hieda;K. Eguchi;N. Fukushima;T. Aoyama;K. Natori(et. al.)
  11. J. Mater. Res. v.13 no.2 Influence of the Microstructure of Pt/Si Substrates on Textured Growth of Barium Titanate Thin Films Prepared by Pulsed Laser Deposition C. S. Hwang;M. D. Vaudin;P. K. Schenck
  12. Jpn. J. Appl. Phys. v.36 Microstructure and Preferred Orientation of BaTiO₃ Thin Films on Pt/Ti/SiO₂/Substrates Prepared by Ultrasonic Spraying Deposition I. T. Kim;S. J. Chung;S. J. Park