References
- Microelectron. Eng. v.4 Fabrication of microstructures with high-aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastics moulding(LIGA process) E. W. Becker;W. Ehrfeld;P. Hagmann;A. Maner;D. Munchmeyer
- Kfk-Bericht Untersuching zur Abformung von galvanoforming Mikrostrukturen mit groβer Strukturnhohe aus elektrisch leitfahigen und isolierenden Kunstsoffen M. Harmening;W. Ehrfeld
- Proc. SPIE-Int. Soc. Opt. Eng. v.2194 Micromechanics for actuators via deep X-ray lithography H. Guckel;K. J. Skrobis;T. R. Christenson;J. Klein
- IEEE Trans. on Indust. Elec. v.42 The LIGA technique and its potential for microsystem- a survey W. Bacher;W. Menz;J.Mohr
- IEEE Trans. Microwave Theory Tech. v.MTT-13 The numerical solution of some importing transmission-line problems H. E. Green
- Microwave Engineering D. M. Pozar
- Foundations for Microstrip Circuit Design T. Edwards
- Jmicro Technology Product Information