한국세라믹학회지 (Journal of the Korean Ceramic Society)
- 제37권2호
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- Pages.168-173
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- 2000
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- 1229-7801(pISSN)
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- 2234-0491(eISSN)
$YMnO_3$ 강유전 박막의 열처리 분위기가 결정화거동과 전기적 특성에 미치는 영향
Effects of Annealing Atmosphere on Crystallization and Electrical Properties in $YMnO_3$ Ferroelectric Thin Films
초록
YMnO3 thin films were prepared on Pt/Ti/SiO2/Si substrate by chemical solution deposition method. The films were crystallized by heat-treatment at 85