The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design and fabrication of a Micromechanical Switch Using Polysilicon Surface Micromachining

다결정실리콘 표면 미세가공 기술을 이용한 초소형 기계식 스위치의 설계 및 제작

  • 채경수 (고려대 마이크로머시닝학과) ;
  • 한승오 (KIST 마이크로시스템 연구센터 연구원) ;
  • 하종민 (고려대 마이크로머시닝학과) ;
  • 문성욱 (KIST 마이크로시스템 연구센터 연구원) ;
  • 박정호 (고려대 전기공학과)
  • Published : 2000.09.01
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Abstract

A micromechanical switch that can be used as a logic gate is described in this paper. This switch consists of fixed input electrodes an output electrode Vcc/GND electrodes and movable plates suspended by crab-leg flexures. for mechanical switching of an electrical signal a parallel plate actuator which comes in contact with output electrode was used. Provided that movable plates are connected to Vcc and a low input voltage(ground signal) is applied to the fixed input electrodes the movable plates are pulled by an electrostatic force between the fixed input electrodes and the movable plates. the proposed micromechanical switch was fabricated by surface micromachining technology with$2\mum$ -thick poly-Si and the measured threshold voltage for ON/OFF switching was 23.5V.

Keywords

References

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