The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Fabrication and Experiment of Micromirror with Aluminum Pin-joint

알루미늄 핀-조인트를 사용한 마이크로 미러의 제작과 측정

  • 지창현 (서울대 전기·컴퓨터공학부) ;
  • 김용권 (서울대 전기·컴퓨터공학부·)
  • Published : 2000.08.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper describes the design, fabrication and experiments of surface-micromachined aluminum micromirror array with hidden pin-joints. Instead of the conventional elastic spring components as connection between mirror plate and supporting structure, we used pin-joint composed of pin and staples to support the mirror plate. The placement of pin-joint under the mirror plate makes large active surface area possible. These flexureless micromirrors are driven by electrostatic force. As the mirror plate has discrete deflection angles, the device can be ap;lied to adaptive optics and digitally-operating optical applications. Four-level metal structural layers and semi-cured photoresist sacrificial layers were used in the fabrication process and sacrificial layers were removed by oxygen plasma ashing. Static characteristics of fabricated samples were measured and compared with modeling results.

Keywords

References

  1. Jong-Woo Shin, Yong-Kweon Kim, Ho-Seung Kim, Bum - Kyoo Choi, 'Fabrication of Micro Mirror Array with Vertical Spring Structure,' Proc. of ETFA '96, vol. 2, pp. 408-412, 1996 https://doi.org/10.1109/ETFA.1996.573627
  2. Seok-Whan Chung, long-Woo Shin, Yong-Kweon Kim, Bong-Soo Han, 'Design and Fabrication of Micromirror Supported by Electroplated Nickel Posts,' Sensors and Actuators, A54, pp. 464-467, 1996 https://doi.org/10.1016/S0924-4247(97)80004-0
  3. Larry J. Hornbeck, '128${\times}$128 Deformable Mirror Devices,' IEEE Transactions on Electron Devices, vol. 30, pp. 539-545, 1983
  4. Raji Krishnamoorthy, Thomas Bifano, 'MEMS Arrays for Deformable Mirrors,' Proc. of SPIE, vol. 2641, pp. 96-104, 1995 https://doi.org/10.1117/12.220931
  5. John H. Comtois, Victor M. Bright, Steven C. Gustafson, M. Adrian Michalicek, 'Implementation of Hexagonal Micromirror Arrays as Phase-Mostly Spatial Light Modulators,' Proc. of SPIE, vol. 2641, pp.76-87, 1995 https://doi.org/10.1117/12.220944
  6. Gleb Vdovin, Simon Middelhoek, 'Deformable Mirror Display with Continuous Reflecting Surface Micromachined in Silicon,' Proc. of IEEE Micro Electro Mechanical Systems Workshop, pp.61-65, 1995
  7. M. Adrian Michalicek, John H. Comtois, and Heather K. Schriner, 'Design and Fabrication of Optical MEMS Using a Four-Level, Planarized, Surface-Micromachined Polycrystalline Silicon Process,' Miniaturized Systems with Micro-Optics and Micromechanics III, SPIE vol. 3276, pp. 48-55, 1998 https://doi.org/10.1117/12.302408
  8. Kristofer S. J. Pister, 'Hinged Polysilicon Structures with Integrated CMOS TFTS,' Proc. of IEEE Solid State Sensor and Actuator Workshop, pp. 136-139, 1992 https://doi.org/10.1109/SOLSEN.1992.228307
  9. K. S. J. Pister, M. W. Judy, S. R. Burgett, and R. S. Fearing, 'Microfabricated Hinges,' Sensors and Actuators, A33, pp. 249-256, 1992 https://doi.org/10.1016/0924-4247(92)80172-Y
  10. N. C. Tien, O. Solgaard, M-H. Kiang, M. Daneman, K. Y. Lau, R. S. Miller, 'Surface-Micromachined Mirrors for Laser-Beam Positioning,' Proc. of the 8th International Conference on Solid-State Sensors and Actuators, vol. 2, pp. 352-355, 1995
  11. Patrick B. Chu, Phyllis R. Nelson, Mark L. Tachiki, and Kristofer S. J.. Pister, 'Dynamics of Polysilicon Parallel- Plate Electrostatic Actuators,' Proc. of the 8th International Conference on Solid-State Sensors and Actuators, vol. 2, pp. 356-359, 1995.
  12. John H. Comtois, M. Adrian Michalicek, Carole Craig Barron, 'Fabricating Micro-Instruments in Surface-Micromachined Polycrystalline Silicon,' Proc. of the 43th International Instrumentation Society of America, pp. 169-179, 1997
  13. A. Rump, U. Gosele, F. Fischer, P. Hein, J. Marek, H. Munzel, S. Pinter and M. Schofthaler, 'Investigating Mechanisms of Adhesion in MEMS by Capacitance- Voltage Measurements with Micromachined Comb-Structures,' Technical Digest of the 10th International Conference on Solid-State Sensors and Actuators, vol. 1, pp. 500-503, 1999