대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
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솔레노이드 코일을 이용한 전자 마이크로 펌프의 제작 및 시험

Fabrication and Test of an Electromagnetic Micropump using Solenoid Coil

  • 발행 : 2000.05.01
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초록

This paper presents the fabrication and test of a micropump with an electromagnetic actuator and a pair of aluminum flap valves. The actuator consists of a solenoid coil, a permanent magnet and an actuator diaphragm. The actuator diaphragm is fabricated by the spin coating of silicone rubber. The valve are passive ones and are fabricated by micromachining. The deflection of the fabricated actuator diaphragm is measured with a laser vibrometer. The deflection of the actuator diaphragm is proportional to the input current. The measured deflection of the fabricated diaphragm is $400 \mum$,/TEX> when the input is 118 mApp, and the cut-off frequency is 50 Hz. The maximum flow rate of the fabricated micropump with the electromagnetic actuator is about 5$0 \muell/min$ at 5 Hz when the input current and the duty ratio of the square was are 118 mApp and 50%, respectively.

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참고문헌

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  6. Qiulian Gong and Zhaoying Zhou, 'Design, Optimization and Simulation on Micro Electromagnetic Pump,' The 10th International Conference on Solid-State Sensor and Actuators (TRANSDUCERS '99), Vol. 1, Sendai, Japan, pp. 466-469, June 7-10, 1999