The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Smart Actuators Composed of Piezoelectric Ceramics and Highly Magnetostrictive films

압전세라믹 기판과 고자왜박막을 결합한 스마트액츄에이타

  • 신광호 (삼성종합기술원 MEMS Lab. 연구원) ;
  • ;
  • Published : 2000.05.01
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Abstract

This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator.

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References

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