The Transactions of the Korean Institute of Electrical Engineers D (대한전기학회논문지:시스템및제어부문D)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design of Force Rebalance Loop for Silicon Accelerometer using Parametric Robust Control Technique

변수적 강인해석기법을 이용한 실리콘 가속도계의 재평형루프 설계

  • Published : 2000.03.01
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Abstract

In this paper, presented are an active surface-micromachined silicon accelerometer, force rebalance loop using parametric robust control method, and experimental results with a real micromachined accelerometer. And finally, a robust controller of the form of PID compensator was designed to construct force rebalance loop. Through the frequency response analysis, it is shown that the loop guarantees appropriate stability and robustness. Experiments with a real accelerometer demonstrated that the proposed loop effectively controls the position of the accelerometer's proof mass. It also demonstrated that the resolution of the fabricated accelerometer is better than 1mg. Compared with a commercial accelerometer the proposed force rebalance silicon accelerometer showed better performances.

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References

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