변수적 강인해석기법을 이용한 실리콘 가속도계의 재평형루프 설계

Design of Force Rebalance Loop for Silicon Accelerometer using Parametric Robust Control Technique

  • 발행 : 2000.03.01

초록

In this paper, presented are an active surface-micromachined silicon accelerometer, force rebalance loop using parametric robust control method, and experimental results with a real micromachined accelerometer. And finally, a robust controller of the form of PID compensator was designed to construct force rebalance loop. Through the frequency response analysis, it is shown that the loop guarantees appropriate stability and robustness. Experiments with a real accelerometer demonstrated that the proposed loop effectively controls the position of the accelerometer's proof mass. It also demonstrated that the resolution of the fabricated accelerometer is better than 1mg. Compared with a commercial accelerometer the proposed force rebalance silicon accelerometer showed better performances.

키워드

참고문헌

  1. B. Wenk, M. Fehrenbach and W. Riethrnuller, 'Thick polysilicon surface micromachined capacitive accelerometer with force feedback operation', SPIE Vol. 2642, pp.84-94, 1996 https://doi.org/10.1117/12.221186
  2. K. H. Chau, S. R. Lewis and R. T. Howe, 'An integrated force-balanced capacitive accelerometer for low-g applications', International Conference on S. S sensors and actuators, pp. 593-596, Stockholm, June 25-29, 1995 https://doi.org/10.1016/S0924-4247(97)80006-4
  3. Karl J. Ma, Navid Yazdi and Khalil Najafi, 'A Bulk Capacitive Micro Accelerometer With Built-in Overrange and Force Feedback Electrodes', Center for integrated sensors and circuits, Univ. of Michigan, Ann Arbor, MI, 48109-2122, 1992
  4. Kharitonov C. L. 'Asymptotic stability of an equilibrium position of a family of systems of linear differential equations', Differential Uravnen, vol.14 2086-2088, 1978
  5. S. P. Bhattacharyya, H. Chapellat, L. H. Keel, 'Robust Control: The parametric Approach', Prentice Hall International, 1995
  6. 서재범, 심규민, 문홍기 외, 실리콘 펜듈럼 서오보 가속도계의 제작 및 성능 평가, Proc. Of 11th KACC, pp. 56-60, 1996
  7. 이장규, 강태삼, 성상경, 마이크로 자이로의 변위 검출 회로 설계 및 기초 성능 시험, 자동 제어 특화 연구 선터, 1996.8
  8. Jurgen Ackermann, Robust Control : System with Uncertain Physical Parameters, Springer-Verlag, 1993
  9. B. Barmish, 'A Generalization of Kharitonov' s four-polynomial concept for robust stability problem with linearly dependent coefficient perturbations,' IEEE Trans. on Automatic Control, vol.34 no 2, pp 157-165, 1989 https://doi.org/10.1109/9.21087
  10. C. Hollot, F. Kraus, R. Tempo, and B. Barmish, ' Extreme Point results for robust stabilization of interval plants with first order compensator,' in Proc. American Control Conference,(San Diego), pp 2533-2538, 1990 https://doi.org/10.1109/ACC.1990.4174192