The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

The Correlation Properties between Substrate and Molybdenum Back Contacts Fabricated by DC Magnetron Sputtering

DC 반응성 스퍼터링법에 의해 제조된 몰리브덴 후면전극과 기판과의 상관특성분석

  • Published : 2000.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

Bi-layer Mo films were deposited on soda-lime glass substrates using DC magnetron supttering. Increasing gas pressure, the resistivity varied from $1\times10^{-5}\; to\; 8.3\times10^{-3}\; \Omega.cm$. Furthermore, stress direction yielded compressive-to-tensile transition stress curves. The micro-structure of the compressively-stressed film which had poor adhesion consists of tightly packed columns, but of the tensile-stressed films had less dense structure. Under all gas pressure conditions, Mo films exhibited distinctly increasing optical reflection with decreasing gas pressure. The expansion of (110) peak width with the gas pressure meant the worse crystalline growth. The impurity levels in the Mo film exhibited highly concentrated Na, Se and O elements due to less dense micro-structure. The degree of Na diffusion depends on the type of the glass substrate used and the nature of the Mo film.

Keywords

References

  1. J. R. Turtle, M. A. Contrears, J. S. Ward, A. M. Garber, 'The Performance of Cu(InGa)Se2 Based Solar Cells in Conventional and Concentration Applications', Proc. 1996 Spring MRS Meeting, pp.143-147, 1996. 4
  2. T. Negami, M. Nishitani, T. Wada, T, Hirao, 'Preparation of CuInSe2 Films on CdS Films for Photovoltaic Applications', 11th European Photovoltaic Solar Energy Conf., pp. 783-786, 1992. 10
  3. J. Hedstrom and H. Ohlsen, '$ZnO/CdS/Cu(InGa)Se_2$ Thin Film Solar Cells with Improved Performance', IEEE 23rd Photovoltaic Specialists Conference, pp.363-371, 1993. 5
  4. J. Alleman, D. Ginley, F. Hasoon, S. Asher, R. Noufi, 'Enhanced Mo Adhesion on glass with Cr Interlayers for Copper Indium Dieselenide Thin Film Devices', Proc. of Materials Research Society Symposium, Vol. 426 pp. 195-199, 1996. 4
  5. R. J. Matson, J. E. Granata, S. E. Asher, 'Effect of Quantitative Incorporation of Na on Device Properties, Junction Formation, and Micro-structure in $CuInSe_2$ Photovoltaic Devices', Proc. of World Renewable Energy Congress V(WREC-V), 1998. 9
  6. M. A. Contreras, B. Egaas, P. Dippo, J. Webb, S. Asher, 'Changes to the Electrical and Structural Properties of Polycrystalline Thin-Film $Cu(In,Ga)Se_2$ Materials by the Use of Thin MF (M=Na,K,Cs) Precursor Layers', Proc. of the 11th International Conference on Ternary and Multinary Compounds, 1997. 9
  7. F. David, E. Dawson, B. Chad, R. Robert, 'Substrate Influences on CIS Device Performance', Proc. of IEEE 1st World Conference on Photovoltaic Energy Conversion, pp.152-155, 1994. 12 https://doi.org/10.1109/WCPEC.1994.519830
  8. J. H. Scofield, S. Asher, D. Albin, J. Tuttle, M. Contreras, D. Niles, R. Reedy, A. Tennant, R. Noufi, 'Sodium Diffusion, Selenization, and Microstructural Effects Associated with Various Molybdenum Back Contact Layers for CIS-Based Solar Cells', Proc. of IEEE 1st World Conference on Photovoltaic Energy Conversion, pp. 164-167, 1994. 12
  9. M. Bodegard, L. Stolt and J. Hedstrom, 'The Influence of Sodium on the Grain Structure of CuInSe2 Films for Photovoltaic Application', 12th European Photovoltaic Solar Energy Conference, pp.1743-1746, 1994. 10