The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Squeeze Film Damping of Perforated Planar Microstructures

기판에 수직으로 진동하는 다공 평판 미소구조물의 공기감쇠

  • Kim, Eung-Sam ;
  • Jo, Yeong-Ho (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Mun-Eon (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 김응삼 (한국과학기술원 기계공학과 석사) ;
  • 조영호 (한국과학기술원 기계공학과) ;
  • 김문언 (한국과학기술원 기계공학과)
  • Published : 2000.01.01
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Abstract

This paper investigates the equeeze film damping of a perforated planar micromechanical structure that oscillates in the normal direction to the substrate. Special focus has been places on the effect of holes and edges of the perforated planar microstructures on the squeeze film damping of oscillatory motions. Theoretical models and test structures of the squeeze film damping have been developed for the transversely oscillating perforated plates. A set of nine different test structures, having three different sized with three different numbers of perforations, has been fabricated and tested. The experimental Q-factors, measured from the fabricated test structures, are compared with the theoretical values, estimated from finite element analysis. It is found that the finite element analysis overestimates the Q-factors up to 150% of the experimental values. Major discrepancy comes from the inaccuracy of the zero pressure condition, placed by the finite element analysis along the perforated edges.

Keywords

References

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