Journal of the Korean Electrochemical Society (전기화학회지)
- Volume 3 Issue 1
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- Pages.11-14
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- 2000
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- 1229-1935(pISSN)
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- 2288-9000(eISSN)
DOI QR Code
Fabrication of ITO Thin Film by Sol-Gel Method
Sol-Gel 법을 이용한 ITO박막의 제조
- Kim Gie-Hong (Dept. of Metallurgical Engineering and Materials Science Hongik University) ;
- Lee Jae-Ho (Dept. of Metallurgical Engineering and Materials Science Hongik University) ;
- Kim Young-Hwan (Dept. of Metallurgical Engineering and Materials Science Hongik University)
- Published : 2000.02.01
Abstract
Transparent conducting ITO thin films have been studied and developed for the solar cell substrate or LCD substrate. ITO thin film has been mostly fabricated by high cost sputtering method. In this research, sol-gel method is applied to fabricate ITO thin film at lower cost. The research is focused on the establishment of process condition and development of precursor. Organic sol was made of indium tri-isopropoxide dissolved in ethylene glycol monoethyl ether. The hydrolysis was controled by addition of acetyl acetone. Tin(IV) chloride was added as dopant. Inorganic sol was made of indium acetate dissolve din normal propanol. Spin coating technique was applied to coat ITO on borosilicate glass. The resistivity of ITO thin film was approximately
가시광선 영역에서의 높은 투과성과 우수한 전도성을 가진 전도성 ITO박막은 그 전기적 광학적 특성에 의해서 태양 전기 기판의 전극 재료나 Display소자의 투명전극으로 개발되고 있다. 이들의 제작은 현재 sputtering이 주종을 이루나 이들의 높은 생산비를 절감할 목적으로 sol-ge떫을 이용하여 ITO박막을 만들었다. ITO제조용 sol은 유기질 sol로는 indium tri-iso-propoxide를 ethylene glycol monoethyl ether에 녹인 후