센서학회지 (Journal of Sensor Science and Technology)
- 제9권3호
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- Pages.196-202
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- 2000
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
브리지조합 검출방식을 이용한 고온용 3축 가속도센서 제작
Fabrication of the Three Dimensional Accelerometer using Bridge Combination Detection Method
- Son, Mi-Jung (School of Electrical eng. & Computer Science, Yeungnam University) ;
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Seo, Hee-Don
(School of Electrical eng. & Computer Science, Yeungnam University)
- 발행 : 2000.05.31
초록
본 논문에서는 3축의 가속도를 검출하기 위한 새로운 방식인 브리지조합 검출원리를 제안하고, SOI 구조의 웨이퍼를 이용하여
In this paper, we proposed the new bridge combination detection method for three dimensional piezoresistive silicon accelerometer, and the accelerometer with SOI structures was fabricated by bulk micromachining technology for using higher temperature than
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