Journal of Sensor Science and Technology (센서학회지)
- Volume 9 Issue 2
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- Pages.113-119
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- 2000
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
$H_2$ sensor for detecting hydrogen in DI water using Pd membrane
수중 수소 감지를 위한 MISFET형 센서제작과 그 특성
- Cho, Yong-Soo (School of Electonic & Electrical Eng., Kyungpook National Univ.) ;
- Son, Seung-Hyun (School of Electonic & Electrical Eng., Kyungpook National Univ.) ;
- Choi, Sie-Young (School of Electonic & Electrical Eng., Kyungpook National Univ.)
- Published : 2000.03.31
Abstract
In this work, Pd/Pt gate MISFET sensor using Pd membrane was fabricated to detect the hydrogen in DI water. A differential pair-type was used to minimize the intrinsic voltage drift of the MISFET. To avoid hydrogen induced drift of the sensor, the silicon dioxide/silicon nitride double layer was used as the gate insulator of the FET's. In order to eliminate the blister formation on the surface of the hydrogen sensing gate metal, Pd/Pt double metal layer was deposited on the gate insulator. For this type of application sensors need to be isolated from the DI water, and a Pd membrane was used to separate the sensor from the DI water. The output voltage change due to the variation of hydrogen concentration is linear from 100ppm to 500 ppm.
정류수 내 수소 가스를 감지할 수 있는 Pd 박막을 가진 Pd/Pt 게이트 MISFET 수소센서를 제조하였다. 감지게이트 MISFET와 기준 게이트 MISFET의 차동형 센서로 제작하여 MOSFET 고유의 드리프트를 최소화하였다. 수소유입으로 인한 드리프트는
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