한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제16권3호통권96호
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- Pages.62-71
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- 1999
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
의료용 도뇨관 표면의 도선용 구리 박막 증착을 위한 스퍼터링-열증착 연속공정장비의 설계 및 개발
Design and Development of Sputter-evaporation System for Micro-wiring on Medical Catheter
초록
Integrating micro-machined sensors and actuators on the conventional devices with the copper power lines was incompatible to fabricate the mass produced micro electromechanical system (MEMS) devices. To achieve the compatibility of the wiring method between MEMS parts and devices, we developed the three-dimensional sputter-evaporation system that coats micropatterned thin copper films on the surface of the MEMS element. The system consists of a process chamber, two branch chambers, the substrate holder, and a linear-rotary motion feedthrough. Thin copper film was sputtered and evaporated on the biocompatible polymer, Pellethane
키워드