Thin Film Chromel-Alumel Multjunction Thermal Converter

박막형 크로멜-알루멜 다중접합 열전변환기

  • Jung, In-Sik (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Kim, Jin-Sup (School of Electronic and Telecommunication Engineering, Inje University) ;
  • Lee, Jung-Hee (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Lee, Jong-Hyun (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Shin, Jang-Kyoo (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Park, Se-Il (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science) ;
  • Kwon, Sung-Won (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science)
  • 정인식 (慶北大學校 電子電氣工學部) ;
  • 김진섭 (仁濟大學校 電子情報通信工學部) ;
  • 이정희 (慶北大學校 電子電氣工學部) ;
  • 이종현 (慶北大學校 電子電氣工學部) ;
  • 신장규 (慶北大學校 電子電氣工學部) ;
  • 박세일 (韓國標準科學硏究阮 電磁氣硏究部) ;
  • 권성원 (韓國標準科學硏究阮 電磁氣硏究部)
  • Published : 1999.09.01

Abstract

For the purpose of reducing the output voltage fluctuation of thin film multijunction thermal converter, EVANOHM alloy-S and chromel-alumel thermocouple were used as a thin film heater material and as a thermoelement of thrmopile, respectively. The temperature coefficient of the resistance of thin film EVANOHM alloy-S heater was about $1.4 {\times} 10^4/^{\circ}C$, which is very small compared to other materials, and thin film chromel-alumel thermocouple showed relatively small difference of the Seebeck coefficients about $38 {\mu}V/K$. The output voltage fluctuation of the thermal converter was about 0.06% for the initial 120 seconds in air and decreased considerably after preheating for 5 minutes or more. The respective AC-DC voltage and current transfer error ranges of the thermal converter were about ${\pm}$1.6 ppm and ${\pm}$0.7 ppm in the frequency range from 10Hz to 10 kHz and increased remarkably below 10 Hz or above 10 kHz.

박막형 다중접합 열전변환기의 시간에 따른 출력 전압 변화를 감소시키기 위해 벌크의 저항온도계수가 매우 적은 EVANOHM-S 합금을 박막 히터재료로 사용하였고, 또한 Seebeck 계수차이가 비교적 작은 크로멜-알루멜 열전쌍을 박막 열전퇴(thermopile)의 열전요소로 하였다. EVANOHM-S 박막 히터의 저항온도계수는 약 $1.4 {\times} 10^4/^{\circ}C$ 였고, 크로멜-알루멜 박막 열전쌍의 Seebeck 계수차이는 약 $38 {\mu}V/K$였다. 열전변환기의 출력 전압 변화는 공기중에서 처음 120초 동안 약 0.06%였고, 약 5분간이상 히터의 예열후 출력전압 변화는 현저히 감소하였다. 10 Hz ~ 10 kHz의 주파수 범위에서 열전변환기의 교류-직류 전압 및 전류 변환 오차범위는 각각 ${\pm}$1.6 ppm 및 ${\pm}$0.7 ppm이었고, 10Hz 이하 또는 10 kHz 이상의 주파수에서는 교류-직류 변환오차가 크게 증가하였다.

Keywords