Korean Journal of Materials Research (한국재료학회지)
- Volume 9 Issue 12
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- Pages.1181-1187
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- 1999
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- 1225-0562(pISSN)
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- 2287-7258(eISSN)
Seeding Effects on Phase Transformation in Diol-Based Sol-Gel Derived PZT Film
졸-겔 공정에 의해 Diol을 기반으로 제조된 PZT막 상전이에 대한 종자 영향
- An, Byung-Hun (Dept. of Ceramic Engineering, Inha University) ;
- Whang, Chin-Myung (Dept. of Ceramic Engineering, Inha University)
- Published : 1999.12.01
Abstract
PZT(53/47) precursor 1M sols were prepared using a diol based Sol-Gel process, and thin films were deposited by spin coating onto Pt/Ti/
diol을 기반으로 하는 Sol-Gel 방법으로 PZT (53/47) 1M sol 용액을 만들어 회전 코팅법으로 Pt/Ti/
Keywords