한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제32권4호
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- Pages.513-520
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- 1999
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
자장의 배열 및 형태가 유도결합형 플라즈마에 미치는 효과에 관한 연구
A study on the effects of variously configured magnets on the characteristics of inductively coupled plasma
초록
In this study, we investigated the effects of variously configured magnets on the characteristics of the plasmas to enhance plasma uniformity and density of an inductively coupled plasma source. As the magnets, Helmholtz type axial electromagnets and various multi-dipole magnets types around the chamber wall were used. To characterize the plasma as a function of the combination of the magnets and magnetic field strengths, ion density, electron temperature, and plasma potential were measured using an electrostatic probe along the chamber diameter for Ar plasmas. The measured maximum ion densities were
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