한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제32권3호
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- Pages.433-439
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- 1999
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
PROPERTIES OF Mo COMPOUNDS AS A DIFFUSION BARRIER BETWEEN Cu AND Si PREPARED BY CO-SPUTTERING
- Lee, Yong-Hyuk (Department of Materials Engineering, SungKyunKwan University) ;
- Park, Jun-Yong (Department of Materials Engineering, SungKyunKwan University) ;
- Bae, Jeong-Woon (Department of Materials Engineering, SungKyunKwan University) ;
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Yeom, Geun-Young
(Department of Materials Engineering, SungKyunKwan University)
- 발행 : 1999.06.01
초록
In this study, the diffusion barrier properties of
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