Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 32 Issue 3
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- Pages.377-384
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- 1999
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
EFFECTS OF AMINES ON COPPER ETCHING WITH H$_2$ SO$_4$ -$H_2O$ $_2$ SYSTEMS
- Kobayashi, Katsuyoshi (Department of Materials Chemistry, Yokohama National University) ;
- Minami, Naoki (Department of Research and Development, Ferric Inc.) ;
- Chiba, Atsushi (Department of Materials Chemistry, Yokohama National University)
- Published : 1999.06.01
Abstract
The corrosion of copper in